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1

Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma

Hyo-Chang Lee, Jin-Young Bang, Chin-Wook Chung

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 690 KB

english, 2011

2

Electrical and plasma characterization of a hybrid plasma source combined with inductively coupled and capacitively coupled plasmas for O atom generation

Kim, Kwan-Yong, Kim, Kyung-Hyun, Moon, Jun-Hyeon, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2020

File:

PDF, 2.32 MB

2020

3

Comparisons of the electrical characteristics by impedance matching conditions on the E–H and H–E transition and the hysteresis of inductively coupled plasma

Hyo-Chang Lee, Chin-Wook Chung

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 287 KB

english, 2012

4

Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas

Oh, Se-Jin, Choi, Ik-Jin, Kim, Jin-Yong, Chung, Chin-Wook

Journal:

Measurement Science and Technology

Year:

2012

Language:

english

File:

PDF, 552 KB

english, 2012

5

Radio frequency-compensated Langmuir probe with auxiliary double probes

Oh, Se-Jin, Oh, Seung-Ju, Chung, Chin-Wook

Journal:

Review of Scientific Instruments

Year:

2010

Language:

english

File:

PDF, 673 KB

english, 2010

6

Thermal Compression Chip Interconnection Using Organic Solderability Preservative Etched Substrate by Plasma Processing

Cho, Sung-Won, Choi, JoonYoung, Chung, Chin-Wook

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2014

Language:

english

File:

PDF, 854 KB

english, 2014

7

Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas

Choi, Ikjin, Kim, Aram, Lee, Hyo-Chang, Kim, Dong-Hwan, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2017

Language:

english

File:

PDF, 1.18 MB

english, 2017

8

Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas

Kim, Ju-Ho, Kwon, Deuk-Chul, Chung, Chin-Wook

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2020

File:

PDF, 1.34 MB

2020

9

Impedance transition and series resonance between bulk plasma and sheath in biased inductively coupled plasma

Hyo-Chang Lee, Chin-Wook Chung

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 302 KB

english, 2010

10

Harmonic analysis of sideband signals generated in plasmas

Sung-Ho Jang, Gun-Ho Kim, Chin-Wook Chung

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 351 KB

english, 2011

11

Photoresist ashing technology using N2/O2ferrite-core ICP in the dual damascene process

Hyoun Woo Kim, Ju Hyun Myung, Jong Woo Lee, Hyung-Sun Kim, Keeho Kim, Jeong-Yeol Jang, Tae-Ho Yoon, Sung Kyeong Kim, Dae-Kyu Choi, Chin-Wook Chung, Geun Young Yeom, Jae-Min Myoung, Hyoung-June Kim

Journal:

Journal of Materials Science

Year:

2006

Language:

english

File:

PDF, 266 KB

english, 2006

12

E–H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas

Jung-Kyu Lee, Hyo-Chang Lee, Chin-Wook Chung

Journal:

Current Applied Physics

Year:

2011

Language:

english

File:

PDF, 972 KB

english, 2011

13

On the multistep ionizations in an argon inductively coupled plasma

Lee, Min-Hyong, Jang, Sung-Ho, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2006

Language:

english

File:

PDF, 419 KB

english, 2006

14

Method for measurement of transferred power to plasma in inductive discharges

Hwang, Hye-Ju, Kim, Young-Cheol, Chung, Chin-Wook

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 322 KB

english, 2013

15

Corrigendum to “Method for the measurement of transferred power to plasma in inductive discharges” [Thin Solid Films 547 (2013) 9-12]

Hwang, Hye-Ju, Kim, Young-Cheol, Chung, Chin-Wook

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 51 KB

english, 2014

16

Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge

Lee, Soo-Jin, Lee, Hyo-Chang, Bang, Jin-young, Oh, Seung-Ju, Chung, Chin-Wook

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 779 KB

english, 2013

17

Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma

Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2010

Language:

english

File:

PDF, 376 KB

english, 2010

18

Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma

Han, Duksun, Lee, Hyo-Chang, Kim, H J, Kim, Yu Sin, Chung, Chin-Wook, Chae, Heesun

Journal:

Plasma Sources Science and Technology

Year:

2013

Language:

english

File:

PDF, 1.12 MB

english, 2013

19

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

Kim, Jin-Yong, Lee, Hyo-Chang, Kim, Young-Do, Kim, Young-Cheol, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 1.09 MB

english, 2013

20

Nonlinear circuit analysis of harmonic currents in a floating Langmuir probe with a capacitive load

Kim, Kyung-Hyun, Kim, Dong-Hwan, Chung, Chin-Wook

Journal:

Plasma Sources Science and Technology

Year:

2016

Language:

english

File:

PDF, 3.05 MB

english, 2016

21

Response to “Comment on ‘Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas’” [Phys. Plasmas 22, 044701 (2015)]

Kim, June Young, Kim, Young-Cheol, Kim, Yu-Sin, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2015

Language:

english

File:

PDF, 56 KB

english, 2015

22

Nonlinear circuit analysis of intermodulation currents in a floating Langmuir probe with a capacitive load

Kim, Kyung-Hyun, Lee, Moo-Young, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2020

File:

PDF, 2.97 MB

2020

23

Control of electron and ion density profiles via virtual ground position control in an inductively coupled plasma

Kim, Tae-Woo, Kim, Ju-ho, Lee, Moo-Young, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2020

File:

PDF, 4.17 MB

2020

24

Application of N2/Ar inductively coupled plasma → the photoresist ashing for low-kdielectrics

Hyoun Woo Kim, Ju Hyun Myung, Nam Ho Kim, Chung-Gon Yoo, Kee Won Suh, Sung Kyeong Kim, Dae-Kyu Choi, Chin-Wook Chung, Chang-Jin Kang, Wan Jae Park, Se-Geun Park, Jae-Gab Lee

Journal:

Journal of Materials Science

Year:

2005

Language:

english

File:

PDF, 240 KB

english, 2005

25

Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas

Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physical Review E

Year:

2010

Language:

english

File:

PDF, 319 KB

english, 2010

26

Plasma characteristics in a solenoidal inductive/capacitive discharge under a weak dc magnetic field

Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2007

Language:

english

File:

PDF, 1.13 MB

english, 2007

27

Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

Lee, Hyo-Chang, Kim, Young-Cheol, Chung, Chin-Wook

Journal:

IEEE Transactions on Plasma Science

Year:

2011

Language:

english

File:

PDF, 316 KB

english, 2011

28

[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Characterization of Inductively Coupled Plasma Driven with Ferrite Cores at 400 kHz

Lee, WonKi, Chung, Chin-Wook, Godyak, V. A.

Year:

2005

Language:

english

File:

PDF, 984 KB

english, 2005

29

Spatial measurements of electron energy distribution and plasma parameters in a weakly magnetized inductive discharge

Kim, Young-Do, Lee, Young-Kwang, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 882 KB

english, 2013

30

Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias

Lee, Hyo-Chang, Oh, SeungJu, Chung, Chin-Wook

Journal:

Plasma Sources Science and Technology

Year:

2012

Language:

english

File:

PDF, 247 KB

english, 2012

31

On the E to H and H to E transition mechanisms in inductively coupled plasma

Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2006

Language:

english

File:

PDF, 426 KB

english, 2006

32

Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy

Lee, Young-Kwang, Moon, Se-Youn, Oh, Se-Jin, Chung, Chin-Wook

Journal:

Journal of Physics D Applied Physics

Year:

2011

Language:

english

File:

PDF, 370 KB

english, 2011

33

A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model

Kim, Young-Do, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 685 KB

english, 2013

34

Effect of antenna size on electron kinetics in inductively coupled plasmas

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 1.24 MB

english, 2013

35

Nonlocal electron kinetics in a planar inductive helium discharge

Seo, Sang-Hun, Chung, Chin-Wook, Hong, Jung-In, Chang, Hong-Young

Journal:

Physical Review E

Year:

2000

Language:

english

File:

PDF, 399 KB

english, 2000

36

Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

Lee, Hyo-Chang, Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2010

Language:

english

File:

PDF, 357 KB

english, 2010

37

Observation of inverse hysteresis in the E to H mode transitions in inductively coupled plasmas

Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Plasma Sources Science and Technology

Year:

2010

Language:

english

File:

PDF, 182 KB

english, 2010

38

Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas

Kim, Young-Cheol, Jang, Sung-Ho, Oh, Se-Jin, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Review of Scientific Instruments

Year:

2013

Language:

english

File:

PDF, 1.86 MB

english, 2013

39

Real time feedback control of plasma density using a floating probe in semiconductor processing

Jang, Sung-Ho, Oh, Se-Jin, Lee, Young-Kwang, Chung, Chin-Wook

Journal:

Current Applied Physics

Year:

2013

Language:

english

File:

PDF, 376 KB

english, 2013

40

Colorimetric polydiacetylene for plasma diagnostics

Lee, Hyo-Chang, Jeon, Seongho, Kim, Jong-Man, Chung, Chin-Wook

Journal:

Sensors and Actuators B: Chemical

Year:

2014

Language:

english

File:

PDF, 1.37 MB

english, 2014

41

[IEEE 2014 IEEE Wireless Power Transfer Conference (WPTC) - Jeju City, South Korea (2014.5.8-2014.5.9)] 2014 IEEE Wireless Power Transfer Conference - A new design of wireless power transfer system using hellical resonators applicapable to multi-channel power transmission

Kim, Young-do, Lee, Hee-Jin, Bang, Jin-Young, Chung, Chin-Wook

Year:

2014

Language:

english

File:

PDF, 278 KB

english, 2014

42

Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma

Lee, Min-Hyong, Chung, Chin-Wook

Journal:

Applied Physics Letters

Year:

2005

Language:

english

File:

PDF, 259 KB

english, 2005

43

Distributed Ferromagnetic Inductively Coupled Plasma as an Alternative Plasma Processing Tool

Godyak, Valery, Chung, Chin-Wook

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 283 KB

english, 2006

44

Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing

Lee, Kyeonghyo, Lee, Youngkwang, Jo, Sungwon, Chung, Chin-Wook, Godyak, Valery

Journal:

Plasma Sources Science and Technology

Year:

2008

Language:

english

File:

PDF, 459 KB

english, 2008

45

Control of electron energy distribution by adding a pulse inductive field in capacitive discharge

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Plasma Sources Science and Technology

Year:

2014

Language:

english

File:

PDF, 890 KB

english, 2014

46

Effect of adding small amount of inductive fields to O2, Ar/O2 capacitively coupled plasmas

Lee, Min-Hyong, Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

Journal of Applied Physics

Year:

2012

Language:

english

File:

PDF, 537 KB

english, 2012

47

Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO[sub 2] Thin Films

Kim, Hyungchul, Woo, Sanghyun, Lee, Jaesang, Kim, Yongchan, Lee, Hyerin, Choi, Ik-Jin, Kim, Young-Do, Chung, Chin-Wook, Jeon, Hyeongtag

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 471 KB

english, 2011

48

Power dependence of electron density at various pressures in inductively coupled plasmas

Kim, June Young, Kim, Dong-Hwan, Kim, Ju Ho, Jeon, Sang-Bum, Cho, Sung-Won, Chung, Chin-Wook

Journal:

Physics of Plasmas

Year:

2014

Language:

english

File:

PDF, 1.14 MB

english, 2014

49

[IEEE 2012 IEEE MTT-S International Microwave Workshop Series on Innovative Wireless Power Transmission: Technologies, Systems, and Applications (IMWS 2012) - Kyoto, Japan (2012.05.10-2012.05.11)] 2012 IEEE MTT-S International Microwave Workshop Series on Innovative Wireless Power Transmission: Technologies, Systems, and Applications - Electromagnetically coupled resonators using toroidal ferrite core for wireless power transfer

Lee, Hee-Jin, Bang, Jin-Young, Chung, Chin-Wook

Year:

2012

Language:

english

File:

PDF, 289 KB

english, 2012

50

Enhanced Plasma Uniformity in RF Plasma With Side Multihole

Lee, Hyo-Chang, Chung, Chin-Wook

Journal:

IEEE Transactions on Plasma Science

Year:

2014

Language:

english

File:

PDF, 597 KB

english, 2014